Ultra-wide-bandgap semiconductors have emerged as a potential route towards next generation power and RF devices with superior performance surpassing conventional Si, GaAs, SiC or GaN. Gallium oxide (Ga2O3) is an UWBG material of particular interest due to the availability of large-area native substrates with a wide range of doping required for various applications. Despite tremendous advances, there are many outstanding technical challenges that must be addressed in order to realize the full potential of Ga2O3. These include but are not limited to: substrates development, thin film epitaxy and doping, advanced device scaling and fabrication; thermal management; and benchmarking circuit performance.
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